Plenary Lecture

Nonlinearity and Uncertainty Issues for
Concurrent Design and Control of MEM Systems

Dr. Ahmet Kuzu
TUBITAK (Turkish Scientific and Technological Research Council)
MAM (Maramara Research Center)
BTE (Institute of Information Technologies),
TURKEY

Email: ahmet.kuzu@bte.mam.gov.tr



Associate Professor Seta Bogosyan
UAF, Electrical and Computer Eng. Dept.,
University of Alaska Fairbanks,
USA

Abstract: In this lecture, we will outline nonlinearity and uncertainty sources common to most MEMS systems, and propose control solutions for these uncertainties. Moreover, the concurrent design of MEMS with the consideration of these uncertainties will be discussed. It is a well-known fact that all MEMS structures face some nonlinear effects because of the nature of electrostatic force, coulomb friction and elasticity. Moreover, MEMS processes also include high tolerances which cause high uncertanities in structural parameters, such as in the dimension of beams, and physical parameters, such as viscous friction coefficients, which all affect the system response. Therefore, nonlinear robust control techniques, such as sliding mode control and nonlinear H-inf control, are gaining increased attraction in the control of MEMS devices, by providing rejection against matched nonlinearities and uncertainties. In this study, firstly nonlinearity sources and tolerance effects in MEMS are discussed. Next, several robust nonlinear techniques are discussed to address this problem and system performances under such robust methods are compared with those obtained with classical control methods. Finally, concurrent design methodology considering those issues is introduced.
 

Brief Biography of the Speakers:
Ahmet KUZU has received his B.Sc. degree in electronics and telecommunication engineering in 2003, M,Sc. Degree in mechatronic engineering in 2006 from Istanbul Technical University, and has been a Ph.D candidate in electrical and control engineering at the same university. He is a Senior Researcher at Turkish Scientific and Technological Research Council, where he has worked since 2004.
His research interests are design and control of multidisciplinary systems such as MEMS, NEMS, avionics and biomedical systems. He has authored 10 journal and conference and 3 patent and utility model application. He is PI to several government funded research grants.


Seta Bogosyan has received her B.Sc., M,Sc. and Ph.D degrees in electrical and control engineering from Istanbul Technical University, Turkey in 1981, 1983, and 1991, respectively. She conducted her PhD studies at the Center for Robotics in University of California at Santa Barbara, where she worked as researcher and lecturer between 1987 and 1991. Between 1992 and 2003, she worked as associate professor at Istanbul Technical University and is currently associate professor at the Department of Electrical and Computer Engineering in the University of Alaska Fairbanks, USA
Her research interests are nonlinear control and estimation techniques for electromechanical systems with applications in direct-drive systems, sensorless control of induction motors, hybrid and autonomous vehicles, bilateral systems and remote robotics. She has authored over 80 journal and conference publications and a book on modeling and control of induction motors. She is PI to several NSF, NATO, and other federally funded research grants. She is associate editor of International Journal of Intelligent Automation and Soft Computing and IEEE Industrial Electronics Society (IES) Magazine. She is also an AdCom member and currently, Vice President of IES in Membership Activities since January, 2006.