Plenary Lecture

Control Solutions against Nonlinearities and Uncertainties in MEMS

Professor Ahmet Kuzu
TUBITAK (Turkish Scientific and Technological Research Council)
MAM (Maramara Research Center)
BTE (Institute of Information Technologies)
TURKEY

Co-author: Seta Bogosyan
UAF
(Electrical and Computer Eng. Dept., University of Alaska Fairbanks, University of Alaska Fairbanks)
USA

Abstract: In this paper, a summary of nonlinearities and uncertainties common in most MEMS systems is discussed and control solutions are suggested against such problems. MEMS structures have some nonlinearities because of the nature of electrostatic force, couloumb friction and elasticity. Moreover, MEMS processes also include high tolerances which cause high uncertainties in structural parameters, such as dimension of beams, and physical parameters, such as viscosity friction coefficients, which all affect system response. Hence, robust control techniques, i.e. sliding mode control and nonlinear H-inf control, could be quite effective in the control of MEMS devices, by providing rejection against matched nonlinearities and uncertainties. In this study, firstly nonlinearity sources and tolerance effects in MEMS are discussed. Next, the system performance with classical control techniques is studied. Finally, several robust nonlinear techniques are developed to this aim, and system performance under robust methods are compared with that obtained with classical control methods.

Brief Biography of the Speaker:
Ahmet Kuzu has received his B.Sc. degree in electronics and telecommunication engineering in 2003, M,Sc. Degree in mechatronic engineering in 2006 from Istanbul Technical University, and has been a Ph.D candidate in electrical and control engineering at the same university. He is a Senior Researcher at Turkish Scientific and Technological Research Council, where he has worked since 2004.
His research interests are design and control of multidisciplinary systems such as MEMS, NEMS, avionics and biomedical systems. He has authored 8 journal and conference and 3 patent and utility model application. He is PI to several government funded research grants.